BIN#
MULTI-1
MULTI-2
MULTI-3
MULTI-4
Flow -rate
10-30sccm
31-100sccm
101-300sccm
301-1,000sccm
BIN#
MULTI-5
MULTI-6
MULTI-7
MULTI-8
Flow -rate
1,001-3,000sccm
3,001-5,000sccm
5,001-10,000sccm
10,000-30,000sccm